Managing Heat Loss Around a Wafer Heater for More Stable Operation

https://heater-technology-guide.meridiannest.com/posts/mica-heater-temperature-control-and-sensor-integration-guide

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result